Microelectronics and Optoelectronics Technology

This book is mainly written for the final year of undergraduate and graduate students in physics, materials science and several kinds of engineerings (electrical, materials, etc.) with the objective in mind that it could be used in one semester.

This book includes the fundamental concept of Semiconductor Device Physics: Change transport phenomenon, Continuity equations, Non-Equilibrium Excess carriers in semiconductor, Surface effects, Change storage and diode transients; Contact (Ohmic and Non-Ohmic contacts, their respective band bending under different biasing condition). Semiconductor Hetero Junctions: Energy band diagram, 2-D electron gas, Current Voltage Characterization, High electron mobility. Sub Micron MOSFET: MOSFET Scaling; Short channel effect, Ballistic transport, Sub threshold conduction, Vertical power MOSFET structure and characterization, Insulated gate Bipolar, transistor. Charge Transfer Devices: Dynamic effects in MOS capacitors, Basic Application of CCD, Thin film Transistors. MEMS- Micromachining of Silicon, bulk and surface Micromachining piezo sensitive MEMS pressure sensors. This existing area promises to open up many new areas for microfabrication.

The aim of this book is to provide strong foundation of basic principles of the Micro-Opto Devices by very simpliest language to the students.

Contents

Chapter 1. Semiconductor Fundamentals
Chapter 2. Carrier Transport
Chapter 3. Metal-Semiconductor Junctions
Chapter 4. MOS Capacitors
Chapter 5. MOS Field-Effect-Transistors
Chapter 6. Optoelectronic Devices
Chapter 7. MEMS
Chapter 8. Heterojunction, TED3 and Power MOSFET